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Compound Molecular Pump

Oil-Free Clean Vacuum
High vacuum state
Lower noise
High pumping speed

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Overview

Compound molecular pump is composed of a turbomolecular pump and a drag pump. It combines the characteristics of a turbomolecular pump with a high pumping speed and high compression ratio when handling molecular flow, and a drag pump with a high pumping speed and high compression ratio at high pressures. This extends the application range of molecular pumps.The compound molecular pump is non-selective and exhibits no memory effects on the pumped gas. Due to its high compression ratio for gases with large molecular weights, it can achieve clean high vacuum and ultra-high vacuum without the need for a cold trap and oil baffle.

Features

Oil-Free Clean Vacuum
Achieves very low back pressure, reaching a high vacuum state. 
Higher pumping speed rapidly removes gases, accelerating the evacuation speed of the vacuum system.
With virtually no moving parts internally, it results in lower noise and vibration, leading to lower maintenance costs.

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Supporting Products

Matching backing pump

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Model
TP-200
TP-600
TP-1200
TP-1600
Overall dimension(mm)
208*152*266
265*236*457
294*267*467
327*296*467
Pump body baking temperature(℃)
< 80
< 100
< 120
< 120
Oil filling volume(ml)
/
100
100
100
Pump weight(Kg)
≈ 11
≈ 30
≈ 34
≈ 39
Installation direction
Any angle
Vertical ±5°
Vertical ±5°
Vertical ±5°
Water cooling cooling water flow (L/min)
/
/
/
1
Cooling water temperature(℃)
/
/
/
≤ 25
Ambient temperature(℃)
/
≤ 28
≤ 28
/
Cooling method
Air cooling
Air cooling
Air cooling
Water cooling
It is recommended to use a backing pump(L/S)
<2
4~8
8~15
15
Downtime(min)
<6
<6
<7
<8.5
Start time(min)
<6
<4
<5
<6
Vibration value(μm)
≤ 0.1
≤ 0.1
≤ 0.1
≤ 0.1
Use bearings
Imported ceramic bearings
Imported ceramic bearings
Imported ceramic bearings
Imported ceramic bearings
Rated speed(rpm)
30000
24000
24000
24000
Pumping rate(L/S)
200
600
1200
1600
Front stage flange
KF25
KF40
KF40
KF50
High vacuum flange
KF40
KF40
KF40
KF40

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