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Compound Molecular Pump
Oil-Free Clean Vacuum
High vacuum state
Lower noise
High pumping speed
Overview
Compound molecular pump is composed of a turbomolecular pump and a drag pump. It combines the characteristics of a turbomolecular pump with a high pumping speed and high compression ratio when handling molecular flow, and a drag pump with a high pumping speed and high compression ratio at high pressures. This extends the application range of molecular pumps.The compound molecular pump is non-selective and exhibits no memory effects on the pumped gas. Due to its high compression ratio for gases with large molecular weights, it can achieve clean high vacuum and ultra-high vacuum without the need for a cold trap and oil baffle.
Features
Oil-Free Clean Vacuum
Achieves very low back pressure, reaching a high vacuum state.
Higher pumping speed rapidly removes gases, accelerating the evacuation speed of the vacuum system.
With virtually no moving parts internally, it results in lower noise and vibration, leading to lower maintenance costs.
Model | TP-200 | TP-600 | TP-1200 | TP-1600 |
---|---|---|---|---|
Overall dimension(mm) | 208*152*266 | 265*236*457 | 294*267*467 | 327*296*467 |
Pump body baking temperature(℃) | < 80 | < 100 | < 120 | < 120 |
Oil filling volume(ml) | / | 100 | 100 | 100 |
Pump weight(Kg) | ≈ 11 | ≈ 30 | ≈ 34 | ≈ 39 |
Installation direction | Any angle | Vertical ±5° | Vertical ±5° | Vertical ±5° |
Water cooling cooling water flow
(L/min) | / | / | / | 1 |
Cooling water temperature(℃) | / | / | / | ≤ 25 |
Ambient temperature(℃) | / | ≤ 28 | ≤ 28 | / |
Cooling method | Air cooling | Air cooling | Air cooling | Water cooling |
It is recommended to use a
backing pump(L/S) | <2 | 4~8 | 8~15 | 15 |
Downtime(min) | <6 | <6 | <7 | <8.5 |
Start time(min) | <6 | <4 | <5 | <6 |
Vibration value(μm) | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 | ≤ 0.1 |
Use bearings | Imported ceramic bearings | Imported ceramic bearings | Imported ceramic bearings | Imported ceramic bearings |
Rated speed(rpm) | 30000 | 24000 | 24000 | 24000 |
Pumping rate(L/S) | 200 | 600 | 1200 | 1600 |
Front stage flange | KF25 | KF40 | KF40 | KF50 |
High vacuum flange | KF40 | KF40 | KF40 | KF40 |